The µBIP series is STI’s latest imaging system designed specifically for use with soft x-rays [1-2 nm]; it cannot beused for longer wavelengths such as 193 nm or 248 nm from excimer lasers which would cause severe internaldamage. Most importantly, the system is designed for use with high vacuum chambers using our custom vacuumflange assembly for attaching the optical system to the vacuum chamber. The flanges are rated at >10-8 Torr.
Focus: Adjustable ± 0.35”
Image Rotation: Rotational adjustment about the optical axis for alignment to the camera sensor
Iris Diaphragm:Adjustable from fully closed to wide open.
Camera mount: Standard c-mount
Vacuum Flanges: Conflat® copper vacuum flange, 2.75”, 304, SS. To <10-8 Torr.
FoV: 11.5mm2 with 7.5x Microscope Objective
Wavelength: 1.0 - 20 nm other wavelengths and designs available to 405 nm
Resolution: 10.6 µm
Magnification: 17.5x
OAL: 16.25-16.95”
Vacuum Flange: 2.75” diam. With a 2.312” hole pattern
1Values calculated using1” sensor. Actual values will be determined by the pixel size and overall size of the camera sensor.Measurements taken with sensor-2048 x 2048, 11.3 x 11.3 mm, 5.5 µm pixel, 4.2 Mega pixel camera.
The resolution of the final system is a function of the quality of the optics and the resolution of the camera (pixelsize). STI uses only diffraction limited optics in our system so the final resolution of the system will be defined bythe pixel size of the camera.
The 3x Conflat® 2.75” diameter vacuum flanges (A,B,C) have 6x ¼-28 holes every 60◦on a 2.312” circle (seeillustrations below). A torque wrench is required to compress the vacuum flanges. The compression torque ratingis 144 in-lb, 12 ft-lb, or 16.27 N-m. Additional copper gaskets are available. From STI or MDC Model 191004.
Vacuum flange A is a 0.75” thick mounting flange with 10G crystal and OFE copper gasket. The crystal is recessed 0.17” from the right face of the flange on the vacuum chamber to STI specifications. (see figures #1 and #2). Thisflange is MDC Model-9712002
Vacuum flange B- Viewport is a 0.50” thick mounting flange with fused silica viewport and OFE copper gasket.This Flange is MDC Model-9722005 with Fused Silica viewport reworked to STI specifications.
Vacuum flange C is a 0.75” thick mounting flange to connect the imaging system to the vacuum flanges. This flange is an STI custom part
Focusing: The unit has been focused and locked in prior to shipping but some slippage may have occurred. If an adjustmentin the focus is required- slightly loosen the 3x 10-32x 5/16 flat set screws on the Mid-Tube. This will allow for upto a 0.7” adjustment in the focus location. Note the c-mount and Iris adjustment have moved to the right.
Image Rotation: The Front Tube has 3x 10-32 set scews for image rotation. This will enable users to rotate the image on thecamera sensor to align the image for best analysis. Be sure the Focus Tube screws are locked before rotating thefront tube so as not to loose the focus setting.
Calibration:The system comes calibrated and a calibration certificate is included with each system. STI uses a high resolutionRonchi ruling at the focus. The Ronchi ruling divisions are used to calculate the magnification. Please save theCertificate. If you need to have the system re-calibrated please contact STI for an RMA# for the return.
We do not recommend the use of this instrument with longer
Vacuum flange C is a 0.75” thick mounting flange to connect the imaging system to the vacuum flanges. This flange is an STI custom part
Magnification Options: STI offers several magnification options. Please consult the chart below for the best configuration for yourapplication.
sales@startechinstruments.com
(203) 312-0767
(203)-312-0768