The goal of visualizing and measuring beams in the X-ray has taken on new importance. Star Tech Instruments has developed new systems to analyze these beams for Power/ Energy, Uniformity, High resolution Beam Profile and Image analysis.
Model µBIP10x is a vacuum compatible (1x10-10 Torr) Beam profiler and Beam Imaging system designed for high resolution at 1-10 nm. The system is useful to 200 nm. The 10x mag. field of 1.5 mm has a resolution of 0.6 µm and is sensitive to very low energy levels. The system has been designed for use with a 1.3 x 1.3” sensor but can be modified for other camera formats. Different magnifications and cameras are available upon request.
The μBIP series is STI’s latest imaging system designed specifically for use with soft x-rays [1-2 nm]; it should not be used for longer wavelengths such as 193 nm or 248 nm from excimer lasers which would cause severe internal damage. Most importantly, the system is designed for use with high vacuum chambers using our custom vacuum flange assembly for attaching the optical system to the vacuum chamber. The flanges are rated at >10-8 Torr.
Focus: Adjustable ± 0.35”
Image Rotation: Rotational adjustment about the optical axis for alignment to the camera sensor
Iris Diaphragm: Adjustable from fully closed to wide open.
Camera mount: Standard c-mount
Vacuum Flanges: Conflat® copper vacuum flange, 2.75”, 304, SS. To <10-10 Torr. 2.5 x 1.0” XUV-18
Field of View:1.5mm2 with 10x Microscope Objective
Wavelength:1.0 - 20 nm other wavelengths and designs available to 405 nm
Resolution: 0.6 μm
Magnification:7.5x and 10x
Vacuum Flanges: Conflat® copper vacuum flange, 2.75”, 304, SS. To <10-10 Torr. 2.5 x 1.0” XUV-18
OAL: 16.25-16.95”
Vacuum Flange: 2.75” diam. With a 2.312” hole pattern
The resolution of the final system is a function of the quality of the optics and the resolution of the camera (pixel size). STI uses diffraction limited optics in our system. The final resolution of the system will be primarily defined by the pixel size of the camera.