Beam Profiler Features

  • • Beam Profile/ Image
  • • High Resolution
  • • Wide Field of View
  • • 1 Billion+ pulses
  • • Intensity Distribution
  • • Wavelengths 1nm to 410 nm
  • • Beams to 85 mm Diam.
  • • Beam Uniformity
  • • Polarization Insensitive
  • • High Damage Threshold
  • • Wide Wavelength Range
  • • Vacuum compatible to 10-10Torr
  • • Wide range of Camera Formats

Measurements available

MODEL Aperture mm 1-195 nm
X-ray		 c
110-225 nm
Excimer 		G
1-410 nm
Low Fluence		 P
10-350 nm
Fast, High Fluence		 R
110-380 nm
Slow, High Fluence		 Notes:
µBIPUVX-7.5x 7.5 v v v v v Vacuum Comp.10-10 Torr
µBIPUVX-10x 10 v v v v v
µBIPUVX-25x 25 v v v v v
BSF08 8 v v v v Gen. Beam Profiling
BSF12 12 v v v v Gen. Beam Profiling
BSF23 23 v v v v Gen. Beam Profiling
BSF47 47 v v v v Gen. Beam Profiling
BSZ47 47 v v v v Gen. Beam Profiling
BSZ50 50 v v v v Zoom
BSF85 85 v v v v Large Beams


BFF12G12N Beam Profiler
BFZ-5100 Large Beam Profiler
193 nm Excimer Profile

Instrumentation measurement capabilities includes:

  • • Power
  • • Energy
  • • Beam Position
  • • Beam Fall-off
  • • Beam Uniformity
  • • Beam Profile
  • • Energy distribution
  • • X-ray beam profile
μBIP Model Standard Magnification + Ext 1.5- (E1.5) +Ext 2.0 (E2.0) Resolution Field of View
μBIP-5 7.5x 11x 15x 1.0 µm 5 mm
μBIP-10 10 x 15x 20 x 0.6 µm 1.5 mm

Please contact us if you would like assistance in selecting the best solution for your application.

We continue to develop new and innovative solutions for measurements in the X-ray and ultra-violet.
If you don’t see a system that can would work for your application, please contact us and let us design a custom solution for you.